Bibliografische Daten
ISBN/EAN: 9781461493198
Sprache: Englisch
Umfang: x, 278 S., 33 s/w Illustr., 113 farbige Illustr.,
Auflage: 1. Auflage 2014
Einband: gebundenes Buch
Beschreibung
InhaltsangabeIntroduction.- Critical issues in Oxide-Semiconductor Heteroepitaxy.- Predictive Engineering of Semiconductor-Oxide Interfaces.- Crystalline Functional Oxide Growth Methods.- Thin Oxide Film Characterization Methods.- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy.- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates.- Other Epitaxial Oxides on Semiconductors.- Outlook and Parting Thoughts.- Appendices.
Autorenportrait
InhaltsangabeIntroduction.- Critical issues in Oxide-Semiconductor Heteroepitaxy.- Predictive Engineering of Semiconductor-Oxide Interfaces.- Crystalline Functional Oxide Growth Methods.- Thin Oxide Film Characterization Methods.- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy.- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates.- Other Epitaxial Oxides on Semiconductors.- Outlook and Parting Thoughts.- Appendices.
