Presents a thorough summary of recent advances in microelectronic systems and their applications for personalized healthcare

Integrated Smart Micro-Systems Towards Personalized Healthcareprovides up-to-date coverage of developments in smart microelectronics and their applications in health-related areas such as sports safety, remote diagnosis, and closed-loop health management. Using a comprehensive approach to the rapidly growing field, this one-stop resource examines different methods, designs, materials, and applications of systems such as multi-modal sensing biomedical platforms and non-invasive health monitoring sensors.

The books five parts detail the core units of micro-systems, self-charging power units, self-driven monitor patches, self-powered sensing platforms, and integrated health monitoring systems. Succinct chapters address topics including multi-functional material optimization, multi-dimensional electrode preparation, multi-scene application display, and the use of multi-modal signal sensing to monitor physical and chemical indicators during exercise. Throughout the text, the authors offer key insights on device performance improvement, reliable fabrication processing, and compatible integration designs.Provides an overview self-powered, wearable micro-systems with emphasis on personalized healthcareCovers the working mechanisms and structural design of different energy-harvesting units, energy storage units, and functional unitsIntroduces an integrated self-charging power unit consisting of triboelectric nanogenerators with supercapacitorDescribes a general solution-evaporation method for developing porous CNT-PDMS conductive elastomersExamines a fully-integrated self-powered sweat sensing platform built on a wearable freestanding-mode triboelectric nanogenerator

Integrated Smart Micro-Systems Towards Personalized Healthcare is an essential text for researchers, electronic engineers, entrepreneurs, and industry professionals working in material science, electronics, mechanical engineering, bioengineering, and sensor development.

Yu Song, PhD, Postdoctoral Scholar, Department of Medical Engineering, California Institute of Technology, USA. He has authored more than 60 scientific publications in leading journals including Nature Biotechnology, Science Robotics, and Science Advances.

Wei Gao, PhD, Assistant Professor of Medical Engineering, Division of Engineering and Applied Science, California Institute of Technology, USA. He has authored nearly 100 publications in the fields of wearable devices, biosensors, flexible electronics, micro/nanorobotics, and nanomedicine.

Haixia (Alice) Zhang, PhD, Professor, School of Integrated Circuit, Peking University, China. She is co-author of more than 250 peer-reviewed scientific publications, 8 books and 4 book chapters, and 42 patents. She is the recipient of the 2006 National Invention Award of Science& Technology and the 2014 Geneva Invention Gold Medal, Forbes Top 50 Chinese Lady in Sci& Techn.

Preface ix

1 Introduction 1

1.1 Overview of Integrated Smart Micro-systems 1

1.1.1 The Progress of Portable Smart Micro-systems 2

1.1.2 Integrated Smart Micro-systems Toward Healthcare Monitoring 4

1.2 Three Core Units of Smart Micro-systems 5

1.2.1 Triboelectric Nanogenerator (Energy-Harvesting Unit) 5

1.2.2 Solid-State Supercapacitors (Energy-Storage Unit) 9

1.2.3 Strain Sensors (Functional Sensing Unit) 12

1.3 The Progress of the Integration of Smart Micro-systems 15

1.3.1 Self-Charging Power Unit 16

1.3.2 Self-Driven Monitor Patch 18

1.3.3 Self-Powered Sensing Platform 20

1.4 The Progress of Applications of Integrated Smart Micro-systems 22

1.4.1 Real-Time Health Monitoring 22

1.4.2 Multifunctional HumanMachine Interaction 24

1.4.3 Assisted Precision Therapy 26

1.5 Scope and Layout of the Book 28

1.5.1 Scope of the Book 29

1.5.2 Layout of the Book 31

Abbreviations 33

References 33

2 Core Units of Smart Micro-systems 39

2.1 Triboelectric Nanogenerators for Energy Harvesting 39

2.1.1 Single-electrode Triboelectric Nanogenerator 40

2.1.2 Freestanding Triboelectric Nanogenerator 44

2.2 Supercapacitors for Energy Storage 50

2.2.1 Wearable Supercapacitor 50

2.2.2 Planar Micro-supercapacitor 54

2.3 Piezoresistive Sensors for Function Sensing 61

2.3.1 Conductive Sponge-Based Piezoresistive Sensor 61

2.3.2 Porous Conductive Elastomer-Based Piezoresistive Sensor 67

2.4 Summary 72

Abbreviations 73

References 74

3 Sandwiched Self-charging Power Unit 77

3.1 Self-charging Power Unit 77

3.1.1 Working Principle 78

3.1.2 Theoretical Analysis 79

3.2 Enhancement of TENG Based on Surface Optimization 81

3.2.1 Formation Mechanism of Wrinkle Structure 81

3.2.2 Fabrication Process and Morphology Characterization 82

3.3 Flexible Paper ElectrodeBased Supercapacitor 83

3.3.1 Percolation Theory 84

3.3.2 Flexible CNTPaper Electrode 85

3.3.3 Fabrication Process and Morphology Characterization 87

3.4 Performance Characterization of SCPU 88

3.4.1 Evaluation of TENG 88

3.4.2 Evaluation of SC 92

3.4.3 Self-charging Performance 93

3.5 Applications of SCPU 94

3.5.1 Power Supply for Low-power Electronics 94

3.5.2 Smart Display of Electrochromic Device 95

3.6 Summary 96

Abbreviations 97

References 98

4 All-in-one Self-driven Monitor Patch 101

4.1 Self-driven Monitor Patch 102

4.1.1 Working Principle 102

4.1.2 Theoretical Analysis 102

4.2 Fabrication Process of Self-driven Monitor Patch 104

4.2.1 Solution-Evaporation Method 105

4.2.2 Modulation of Parameters and Morphologies 106

4.2.3 Integrated Fabrication 108

4.3 Performance Characterization of Self-driven Monitor Patch 110

4.3.1 Evaluation of PRS 110

4.3.2 Evaluation of MSC 114

4.4 Applications of Self-driven Monitor Patch 118

4.4.1 Real-time Health Monitoring 118

4.4.2 Personalized HumanMachine Interaction 118

4.4.3 Static Pressure Distribution and Dynamic Tactile Trajectory 120

4.5 Summary 123

Abbreviations 124

References 125

5 Fully Integrated Self-powered Sweat-Sensing Platform 127

5.1 Structural Design of Self-powered Sweat-Sensing Platform 128

5.2 Freestanding Triboelectric Nanogenerator 130

5.2.1 Working Principle and Structural Design 130

5.2.2 Performance Characterization 133

5.3 Potentiometric Electrochemical Sensing Unit 135

5.3.1 Working Principle 136

5.3.2 Microfluidic Structural Design 138

5.3.3 Fabrication Process 139

5.3.4 Performance Characterization 141

5.3.4.1 Sensitivity 141

5.3.4.2 Selectivity 142

5.3.4.3 Cycling Repeatability 142

5.4 System-level Integrated Circuit Module 143

5.4.1 Schematic Diagram and Operation Flow Analysis 145

5.4.2 Performance Characterization 146

5.5 Applications of Fully Integrated Self-powered Sweat-Sensing Platform 149

5.5.1 Validation of Flexible Sensing Unit 149

5.5.2 On-body Evaluation for Dynamic Sweat Analysis 151

5.6 Summary 155

Abbreviations 156

References 156

6 Multimodal Sensing Integrated Health-Monitoring System 159

6.1 Multimodal Sensing Platform 160

6.1.1 Structural Design 160

6.1.2 Fabrication and Morphology of All-Laser-Engraved Process 161

6.2 LEG-based Chemical Sensor for UA and Tyr Detection 165

6.2.1 Performance Characterization 165

6.2.2 Reliability and Selectivity 168

6.3 LEG-based Physical Sensor for Vital Signs Monitoring 171

6.3.1 Evaluation of LEG-based Temperature Sensor 171

6.3.2 Microfluidic Structural Design 173

6.4 System-Level Circuity Module 175

6.4.1 Design and Block Diagram 176

6.4.2 Signal Processing and Validation 179

6.5 On-body Evaluation of Integrated Health-Monitoring System 181

6.5.1 Sweat Analysis at Different Body Parts 181

6.5.2 Multimodal Real-Time Continuous In Situ Measurement 183

6.6 Health-Monitoring System for Non-invasive Gout Management 184

6.6.1 Purine-Rich Diets and Gout 185

6.6.2 Personalized Non-Invasive Gout Management 185

6.7 Summary 189

Abbreviations 190

References 190

7 Progress and Perspectives 193

7.1 The Progress of the Micro-systems 193

7.2 Perspectives of the Micro-systems 195

Abbreviations 196

References 196

Index 199