This comprehensive book reports on recent investigations of lattice imperfections in semiconductors by means of positron annihilation. It reviews positron techniques, and describes the application of these techniques to various kinds of defects, such as vacancies, impurity vacancy complexes and dislocations.

Introduction.- Experimental techniques.- Comparision of positron annihilation to other relevant techniques.- Basics of positron annihilation in semiconductors.- Native defects.- Irradiation induced defects.- Defects after plastic deformation.- Defects in layered structures and near-surface defect profiling.- Defect engineering.