InhaltsangabeChapter 1: Introduction to Helium Ion Microscopy Chapter 2: Microscopy with Ions  - A brief history Chapter 3: Operating the Helium Ion Microscope Chapter 4: Ion -Solid  Interactions  and Image Formation Chapter 5: Charging and  Damage Chapter 6: Microanalysis with the HIM Chapter 7: Ion Generated Damage Chapter 8: Working with other Ion beams Chapter 9: Patterning and Nanofabrication Conclusion Bibliography Appendix: iSE Yields,  and IONiSE  parameters for  He+ excitation  of Elements and Compounds Index